Spectroscopic characterization techniques for semiconductor technology II January 21-22, 1985, Los Angeles, California

Cover of: Spectroscopic characterization techniques for semiconductor technology II |

Published by SPIE--the International Society for Optical Engineering in Bellingham, Wash., USA .

Written in English

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  • Semiconductors -- Testing -- Congresses.,
  • Spectrum analysis -- Congresses.

Edition Notes

Includes bibliographies and index.

Book details

StatementFred H. Pollak, chairman/editor.
SeriesProceedings of SPIE--the International Society for Optical Engineering -- v. 524
ContributionsPollak, Fred H., Society of Photo-optical Instrumentation Engineers.
The Physical Object
Paginationvi, 169 p. :
Number of Pages169
ID Numbers
Open LibraryOL14089148M
ISBN 100892525592
LC Control Number85050424

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Spectroscopic characterization techniques for semiconductor technology II. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering, © (DLC) (OCoLC) Material Type: Conference publication, Document, Internet resource: Document Type: Internet Resource, Computer File: All Authors / Contributors.

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